街机连环夺宝

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Mask Aligner

  • Nano Imprint Kit
  • Nano Imprint Kit
  • Nano Imprint Kit
Nano Imprint Kit Nano Imprint Kit Nano Imprint Kit

Nano Imprint Kit

  • Product description: Nano Imprint Kit

Nano Imprint Kit
EZImprinting’s equipment consists of a nanoimprint module and a controller module. By simply retrofitting your conventional optical mask aligner, our solution can upgrade any facility’s traditional photolithography capacity. EZImprinting provides semiautomatic nanoimprinting with precision nanoscale alignment capabilities. Simple, straight-forward steps direct users through the entire imprint procedure.


Spec

  • Substrate size: 4 inch
  • Imprintable wafer area: 4 inch Maximum
  • Mold substrate size: 5 x 0.09 inch
  • Typical imprint throughput :< 5 min./wafer
  • Imprint pressure:0 - 25 PSI


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