街机连环夺宝

Language: Chinese line English

Mask Aligner

  • MDA-80FA
MDA-80FA

MDA-80FA

  • Product description: MDA-80FA

MDA-80FA

Easy operation UI , PLC Operation with PC control , Image grab & Data log , More than 100 Program recipes , Motorized joystick control , Motorized zoom microscope and stage , Microscope position control system

Spec

  • Type: Full automatic
  • Mask size: up to 9 inch
  • Substrate size: 8 ~ 12 inch
  • Uniform beam size:10.25 * 10.25 inch
  • UV light source:UV Lamp, 2 kW
  • Beam wavelength:350 ~ 450 nm
  • Beam uniformity:<±5 %
  • 365 nm intensity: ~ 25 mW/㎠
  • Alignment method: Full automatic
  • Alignment accuracy: 1 um
  • Process mode: Soft, Hard, Vacuum contact & Proximity
  • Process resolution: 1 um @ 1 um PR thickness with vacuum contact