街机连环夺宝

Language: Chinese line English

Mask Aligner

  • MDA-400LJ/600LJ
MDA-400LJ/600LJ

MDA-400LJ/600LJ

  • Product description: MDA-400LJ/600LJ

MDA-400LJ/600LJ


Easy operation & Installation , Handling Substrates of Various sizes , PLC control with Touch screen panel


spec

  • Type Fully manual
  • Substrate size piece to 6 inch circle
  • Beam wavelength350 nm
  • Beam uniformity<±3 %
  • 365 nm intensity~ 20 mW/㎠
  • Alignment method manual
  • Alignment accuracy1 um
  • Process mode: Soft, Hard, Vacuum contact & Proximity
  • Process resolution:1 um @ 1 um PR thickness with vacuum contact
  • Weight (kg)
  • Dimensions (mm)800(W) * 800(D) * 800(H)